Ion Beam Analysis

Rutherford Backscattering Spectrometry (RBS), Elastic Recoil Detection Analysis (ERDA), Particle Induced X-ray Emission (PIXE) and Nuclear Reaction Analysis (NRA) are powerful MeV ion beam analysis techniques with outstanding quantitativeness. They are mainly applied to surface and thin film analysis with an accessible depth range on the order of a micrometer. Typical depth resolution is a few nm and detection limits range from ppm to percent, depending of the material and the used technique.

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